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Once a pattern is set, material must be removed (etching) or added (PVD/CVD). Sze provides the mathematical models for plasma etching and chemical vapor deposition, which are essential for creating the 3D structures seen in FinFETs. 5. Ion Implantation and Diffusion

Introducing impurities into the silicon to create positive ( -type) and negative ( -type) regions. Metallization: vlsi technology by sm sze pdf hot

: Focus on reactive plasma etching, ion implantation, and diffusion. Metallization : Techniques for interconnecting transistors. Device Technology Once a pattern is set, material must be

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